GrabCAD
Wafer_Holder
by GrabCAD
Last crawled date: 1 year, 10 months ago
This wafer support is a rigid disk which supports a process wafer. Its design and material is compatible with the wafer clamping mechanisms found in most etching tools. It consistently aligns the
wafer to the chuck and has the option for providing direct backside cooling.
wafer to the chuck and has the option for providing direct backside cooling.
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